Abstract
<jats:p>MEMS is one of the fundamental technologies of modern embedded systems giving small, energy-efficient, & very dynamic to robotics, IoT, environmental monitoring, wearable systems, & intelligent automation. Ability to capture multi-physical characteristics (movement, pressure, temperature, humidity & distance) has been a significant factor in the achievement of real time information & autonomy in decision-making in resource constrained environments. MEMS fabrication, signal processing technique, & microcontroller compatibility have been developed quite fast. This has added to their usage in future cyber-physical systems. Global research effort in MEMS sensing has been increasing rapidly as is seen through augmented academic & industrial interest in sensor miniaturization & integration, & multi-sensor fusions. This chapter has presented a bibliometric review on the current research trends & next simulated, analyzed, and integrated four well-known MEMS sensing modules on their operation principles, interface approach, performance issues and applicability in the real world.</jats:p>